HYPER BEAM ARRAY (HBA) LITHOGRAPHY

CD

Ability to scale to sub 10nm

HP

Abilty to scale to 22nm in near future

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Coverage

No Field Size Limitations

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Maskless

The system is completely maskless

Beams

65k beams in current version. Ability to scale 10X

mm

100mm - 300mm Wafers

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What is HBA?

HBA is the practice of streaming focused beams of electrons on a surface covered with an electron-sensitive film (resist) to etch desired shapes onto a substrate. This is accomplished primarily when electron beams react with resists, enabling selective removal of either the exposed or non-exposed regions.

 

 

HBA offers significant advantages in terms of quality control in IC manufacture with the smallest, cleanest patterns and shapes possible. SecureFoundry's capability represents the holy grail of cost-competitive advanced microelectronic production.

A futuristic design of an integrated circuit with displays showing source code. The image represents an abstract design in the domain of computing, security, engineering, electronics or similar advanced technology. This image is a made up 3D concept render.

Advanced Manufacturing

  • Customize/Mark individual chips

  • Track provenance via Blockchain

  • Advanced Nodes [2nm - 28nm]

    Rapid Innovation

    • No Masks

    • Fewer Process Steps

    • Expedite Development

    Silicon Wafers and Microcircuits with Automation system control application
    IC wafer, electronic material, wafer, chip, bare core of electronic component

    Cost Reduction

    • Efficient Processes

    • Expedite "Time to Market"

    • Mitigate Capital Risks

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